Haisheng San, Xiaoshan Zheng, Zhiwen Zhao, Gang Li, Xuyuan Chen. Investigation of charge relaxation of dielectrics for capacitive micro-actuators. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1-4, IEEE, 2010. [doi]
@inproceedings{SanZZLC10,
title = {Investigation of charge relaxation of dielectrics for capacitive micro-actuators},
author = {Haisheng San and Xiaoshan Zheng and Zhiwen Zhao and Gang Li and Xuyuan Chen},
year = {2010},
doi = {10.1109/NEMS.2010.5592128},
url = {http://dx.doi.org/10.1109/NEMS.2010.5592128},
researchr = {https://researchr.org/publication/SanZZLC10},
cites = {0},
citedby = {0},
pages = {1-4},
booktitle = {5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010},
publisher = {IEEE},
}