A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation

Josep Maria Sánchez-Chiva, Juan Valle, Daniel Fernández, Jordi Madrenas. A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation. Sensors, 20(20):5899, 2020. [doi]

@article{Sanchez-ChivaVF20,
  title = {A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation},
  author = {Josep Maria Sánchez-Chiva and Juan Valle and Daniel Fernández and Jordi Madrenas},
  year = {2020},
  doi = {10.3390/s20205899},
  url = {https://doi.org/10.3390/s20205899},
  researchr = {https://researchr.org/publication/Sanchez-ChivaVF20},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {20},
  number = {20},
  pages = {5899},
}