A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation

Josep Maria Sánchez-Chiva, Juan Valle, Daniel Fernández, Jordi Madrenas. A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation. Sensors, 20(20):5899, 2020. [doi]

Abstract

Abstract is missing.