Modular model-based supervisory controller design for wafer logistics in lithography machines - researchr publication authors

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Bram van der Sanden, Michel A. Reniers, Marc Geilen, Twan Basten, Johan Jacobs, Jeroen Voeten, Ramon R. H. Schiffelers. Modular model-based supervisory controller design for wafer logistics in lithography machines. In Timothy Lethbridge, Jordi Cabot, Alexander Egyed, editors, 18th ACM/IEEE International Conference on Model Driven Engineering Languages and Systems, MoDELS 2015, Ottawa, ON, Canada, September 30 - October 2, 2015. pages 416-425, IEEE, 2015. [doi]

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