Bram van der Sanden, Michel A. Reniers, Marc Geilen, Twan Basten, Johan Jacobs, Jeroen Voeten, Ramon R. H. Schiffelers. Modular model-based supervisory controller design for wafer logistics in lithography machines. In Timothy Lethbridge, Jordi Cabot, Alexander Egyed, editors, 18th ACM/IEEE International Conference on Model Driven Engineering Languages and Systems, MoDELS 2015, Ottawa, ON, Canada, September 30 - October 2, 2015. pages 416-425, IEEE, 2015. [doi]
@inproceedings{SandenRGBJVS15, title = {Modular model-based supervisory controller design for wafer logistics in lithography machines}, author = {Bram van der Sanden and Michel A. Reniers and Marc Geilen and Twan Basten and Johan Jacobs and Jeroen Voeten and Ramon R. H. Schiffelers}, year = {2015}, doi = {10.1109/MODELS.2015.7338273}, url = {http://dx.doi.org/10.1109/MODELS.2015.7338273}, researchr = {https://researchr.org/publication/SandenRGBJVS15}, cites = {0}, citedby = {0}, pages = {416-425}, booktitle = {18th ACM/IEEE International Conference on Model Driven Engineering Languages and Systems, MoDELS 2015, Ottawa, ON, Canada, September 30 - October 2, 2015}, editor = {Timothy Lethbridge and Jordi Cabot and Alexander Egyed}, publisher = {IEEE}, isbn = {978-1-4673-6908-4}, }