A 2kPa per stage and 1.3sccm flow rate modular two-stage electrostatic gas micropump with stiffened drive electrodes

Amin Sandoughsaz, Khalil Najafi, Luis P. Bernal. A 2kPa per stage and 1.3sccm flow rate modular two-stage electrostatic gas micropump with stiffened drive electrodes. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

@inproceedings{SandoughsazNB16,
  title = {A 2kPa per stage and 1.3sccm flow rate modular two-stage electrostatic gas micropump with stiffened drive electrodes},
  author = {Amin Sandoughsaz and Khalil Najafi and Luis P. Bernal},
  year = {2016},
  doi = {10.1109/ICSENS.2016.7808679},
  url = {https://doi.org/10.1109/ICSENS.2016.7808679},
  researchr = {https://researchr.org/publication/SandoughsazNB16},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016},
  publisher = {IEEE},
  isbn = {978-1-4799-8287-5},
}