Amin Sandoughsaz, Khalil Najafi, Luis P. Bernal. A 2kPa per stage and 1.3sccm flow rate modular two-stage electrostatic gas micropump with stiffened drive electrodes. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]
Abstract is missing.