Edin Sarajlic, Christophe Yamahata, Erwin Berenschot, Niels Tas, Hiroyuki Fujita, Gijs Krijnen. High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology. Micromachines, 1(2):48-67, 2010. [doi]
@article{SarajlicYBTFK10,
title = {High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology},
author = {Edin Sarajlic and Christophe Yamahata and Erwin Berenschot and Niels Tas and Hiroyuki Fujita and Gijs Krijnen},
year = {2010},
doi = {10.3390/mi1020048},
url = {http://dx.doi.org/10.3390/mi1020048},
researchr = {https://researchr.org/publication/SarajlicYBTFK10},
cites = {0},
citedby = {0},
journal = {Micromachines},
volume = {1},
number = {2},
pages = {48-67},
}