High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology

Edin Sarajlic, Christophe Yamahata, Erwin Berenschot, Niels Tas, Hiroyuki Fujita, Gijs Krijnen. High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology. Micromachines, 1(2):48-67, 2010. [doi]

Abstract

Abstract is missing.