Yuji Sasaki, Mauro Ciappa, Takayuki Masunaga, Wolfgang Fichtner. Accurate extraction of the mechanical properties of thin films by nanoindentation for the design of reliable MEMS. Microelectronics Reliability, 50(9-11):1621-1625, 2010. [doi]
@article{SasakiCMF10,
title = {Accurate extraction of the mechanical properties of thin films by nanoindentation for the design of reliable MEMS},
author = {Yuji Sasaki and Mauro Ciappa and Takayuki Masunaga and Wolfgang Fichtner},
year = {2010},
doi = {10.1016/j.microrel.2010.07.119},
url = {http://dx.doi.org/10.1016/j.microrel.2010.07.119},
tags = {design},
researchr = {https://researchr.org/publication/SasakiCMF10},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {50},
number = {9-11},
pages = {1621-1625},
}