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Accurate extraction of the mechanical properties of thin films by nanoindentation for the design of reliable MEMS

Yuji Sasaki, Mauro Ciappa, Takayuki Masunaga, Wolfgang Fichtner. Accurate extraction of the mechanical properties of thin films by nanoindentation for the design of reliable MEMS. Microelectronics Reliability, 50(9-11):1621-1625, 2010. [doi]

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