Characteristics of SiN/GaAs interface under exposure to high-temperature and high-humidity conditions measured by photoreflectance spectroscopy

Hajime Sasaki, Takayuki Hisaka, Kaoru Kadoiwa, Yoshikazu Terai, Yasufumi Fujiwara. Characteristics of SiN/GaAs interface under exposure to high-temperature and high-humidity conditions measured by photoreflectance spectroscopy. IEICE Electronic Express, 9(20):1592-1597, 2012. [doi]

Authors

Hajime Sasaki

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Takayuki Hisaka

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Kaoru Kadoiwa

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Yoshikazu Terai

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Yasufumi Fujiwara

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