Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer

Minoru Sasaki, Masahiro Ishimori, JongHyeong Song, Kazuhiro Hane. Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer. IEICE Transactions, 90-C(1):147-148, 2007. [doi]

Abstract

Abstract is missing.