2.2um BSI CMOS image sensor with two layer photo-detector

H. Sasaki, A. Mochizuki, Y. Sugiura, R. Hasumi, K. Eda, Y. Egawa, H. Yamashita, K. Honda, Tatsuya Ohguro, Hisayo S. Momose, H. Ootani, Yoshiaki Toyoshima, T. Asami. 2.2um BSI CMOS image sensor with two layer photo-detector. In Ralf Widenhorn, Antoine Dupret, editors, Image Sensors and Imaging Systems 2015, San Francisco, California, United States, 8-12 February 2015. Volume 9403 of SPIE Proceedings, pages 940302, SPIE, 2015. [doi]

Abstract

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