Ryunosuke Sato. Basic Properties of Fixed Abrasive Polishing by Alumina Abrasive Grain for Si Wafer - Effects of Actual Contact Area and Grain Size -. IJAT, 8(4):592-597, 2014. [doi]
@article{Sato14-17,
title = {Basic Properties of Fixed Abrasive Polishing by Alumina Abrasive Grain for Si Wafer - Effects of Actual Contact Area and Grain Size -},
author = {Ryunosuke Sato},
year = {2014},
doi = {10.20965/ijat.2014.p0592},
url = {http://dx.doi.org/10.20965/ijat.2014.p0592},
researchr = {https://researchr.org/publication/Sato14-17},
cites = {0},
citedby = {0},
journal = {IJAT},
volume = {8},
number = {4},
pages = {592-597},
}