Basic Properties of Fixed Abrasive Polishing by Alumina Abrasive Grain for Si Wafer - Effects of Actual Contact Area and Grain Size -

Ryunosuke Sato. Basic Properties of Fixed Abrasive Polishing by Alumina Abrasive Grain for Si Wafer - Effects of Actual Contact Area and Grain Size -. IJAT, 8(4):592-597, 2014. [doi]

Abstract

Abstract is missing.