Application of IEC61131-3 for semiconductor processing equipment - researchr publication authors

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Takashi Sato, Eiji Yoshida, Yasunori Kakebayashi, Joji Asakura, Norihisa Komoda. Application of IEC61131-3 for semiconductor processing equipment. In Proceedings of 8th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2001, October 15-18, 2001, Antibes/Juan les Pins, France - Volume 2. pages 47-50, IEEE, 2001. [doi]

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