Takashi Sato, Eiji Yoshida, Yasunori Kakebayashi, Joji Asakura, Norihisa Komoda. Application of IEC61131-3 for semiconductor processing equipment. In Proceedings of 8th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2001, October 15-18, 2001, Antibes/Juan les Pins, France - Volume 2. pages 47-50, IEEE, 2001. [doi]
@inproceedings{SatoYKAK01, title = {Application of IEC61131-3 for semiconductor processing equipment}, author = {Takashi Sato and Eiji Yoshida and Yasunori Kakebayashi and Joji Asakura and Norihisa Komoda}, year = {2001}, doi = {10.1109/ETFA.2001.997669}, url = {http://dx.doi.org/10.1109/ETFA.2001.997669}, researchr = {https://researchr.org/publication/SatoYKAK01}, cites = {0}, citedby = {0}, pages = {47-50}, booktitle = {Proceedings of 8th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2001, October 15-18, 2001, Antibes/Juan les Pins, France - Volume 2}, publisher = {IEEE}, isbn = {0-7803-7241-7}, }