Making optical MEMS sensors more compact using organic light sources and detectors

Thilo Sauter, Wilfried Hortschitz, Harald Steiner, Michael Stifter, Hsin Chiao, Hsiao Wen Zan, Hsin-Fei Meng, Paul Chao. Making optical MEMS sensors more compact using organic light sources and detectors. In Antoni Grau, Herminio Martínez, editors, Proceedings of the 2014 IEEE Emerging Technology and Factory Automation, ETFA 2014, Barcelona, Spain, September 16-19, 2014. pages 1-4, IEEE, 2014. [doi]

Abstract

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