Robust 2 DOF-control of a piezoelectric tube scanner for high speed atomic force microscopy

Georg Schitter, Andreas Stemmer, Frank Allgöwer. Robust 2 DOF-control of a piezoelectric tube scanner for high speed atomic force microscopy. In American Control Conference, ACC 2003, Denver, CO, USA, June 4-6 2003. pages 3720-3725, IEEE, 2003. [doi]

Abstract

Abstract is missing.