Backside E-Beam Probing on Nano scale devices

Rudolf Schlangen, Reiner Leihkauf, Uwe Kerst, Christian Boit, Rajesh Jain, Tahir Malik, Keneth R. Wilsher, Ted Lundquist, Bernd Kr├╝ger. Backside E-Beam Probing on Nano scale devices. In Jill Sibert, Janusz Rajski, editors, 2007 IEEE International Test Conference, ITC 2007, Santa Clara, California, USA, October 21-26, 2007. pages 1-9, IEEE, 2007. [doi]

Abstract

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