Kilian Schmidt, Jörg Weigang, Oliver Rose. Modeling semiconductor tools for small lotsize FAB simulations. In L. Felipe Perrone, Barry Lawson, Jason Liu, Frederick P. Wieland, editors, Proceedings of the Winter Simulation Conference WSC 2006, Monterey, California, USA, December 3-6, 2006. pages 1811-1816, WSC, 2006. [doi]
@inproceedings{SchmidtWR06,
title = {Modeling semiconductor tools for small lotsize FAB simulations},
author = {Kilian Schmidt and Jörg Weigang and Oliver Rose},
year = {2006},
doi = {10.1145/1218112.1218440},
url = {http://doi.acm.org/10.1145/1218112.1218440},
tags = {modeling},
researchr = {https://researchr.org/publication/SchmidtWR06},
cites = {0},
citedby = {0},
pages = {1811-1816},
booktitle = {Proceedings of the Winter Simulation Conference WSC 2006, Monterey, California, USA, December 3-6, 2006},
editor = {L. Felipe Perrone and Barry Lawson and Jason Liu and Frederick P. Wieland},
publisher = {WSC},
isbn = {1-4244-0501-7},
}