Kilian Schmidt, Jörg Weigang, Oliver Rose. Modeling semiconductor tools for small lotsize FAB simulations. In L. Felipe Perrone, Barry Lawson, Jason Liu, Frederick P. Wieland, editors, Proceedings of the Winter Simulation Conference WSC 2006, Monterey, California, USA, December 3-6, 2006. pages 1811-1816, WSC, 2006. [doi]
Abstract is missing.