Ferdinand Schmoeckel, Heinz Wörn, Matthias Kiefer. The scanning electron microscope as sensor system for mobile microrobots. In Proceedings of 8th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2001, October 15-18, 2001, Antibes/Juan les Pins, France - Volume 2. pages 599-602, IEEE, 2001. [doi]
Abstract is missing.