Backward Simulation: A Customer-Focused Diversification of Fab Simulation Applications in a Highly Automated Semiconductor Production Line

Wolfgang Scholl, Patrick Preuss, Christoph Laroque, Madlene Leißau. Backward Simulation: A Customer-Focused Diversification of Fab Simulation Applications in a Highly Automated Semiconductor Production Line. In Winter Simulation Conference, WSC 2023, San Antonio, TX, USA, December 10-13, 2023. pages 2276-2285, IEEE, 2023. [doi]

@inproceedings{SchollPLL23,
  title = {Backward Simulation: A Customer-Focused Diversification of Fab Simulation Applications in a Highly Automated Semiconductor Production Line},
  author = {Wolfgang Scholl and Patrick Preuss and Christoph Laroque and Madlene Leißau},
  year = {2023},
  doi = {10.1109/WSC60868.2023.10407425},
  url = {https://doi.org/10.1109/WSC60868.2023.10407425},
  researchr = {https://researchr.org/publication/SchollPLL23},
  cites = {0},
  citedby = {0},
  pages = {2276-2285},
  booktitle = {Winter Simulation Conference, WSC 2023, San Antonio, TX, USA, December 10-13, 2023},
  publisher = {IEEE},
  isbn = {979-8-3503-6966-3},
}