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Backward Simulation: A Customer-Focused Diversification of Fab Simulation Applications in a Highly Automated Semiconductor Production Line

Wolfgang Scholl, Patrick Preuss, Christoph Laroque, Madlene Leißau. Backward Simulation: A Customer-Focused Diversification of Fab Simulation Applications in a Highly Automated Semiconductor Production Line. In Winter Simulation Conference, WSC 2023, San Antonio, TX, USA, December 10-13, 2023. pages 2276-2285, IEEE, 2023. [doi]

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