Wolfgang Schreiber-Prillwitz, Reinhart Job. Development process for MEMS pressure sensors for standarized CMOS read-out circuitry. In 29th Symposium on Integrated Circuits and Systems Design, SBCCI 2016, Belo Horizonte, Brazil, August 29 - September 3, 2016. pages 1-6, IEEE, 2016. [doi]
Abstract is missing.