Stefan Schrunner, Anna Jenul, Michael Scheiber, Anja Zernig, Andre Kästner, Roman Kern. A Health Factor for Process Patterns Enhancing Semiconductor Manufacturing by Pattern Recognition in Analog Wafermaps. In 2019 IEEE International Conference on Systems, Man and Cybernetics, SMC 2019, Bari, Italy, October 6-9, 2019. pages 3555-3560, IEEE, 2019. [doi]
@inproceedings{SchrunnerJSZKK19,
title = {A Health Factor for Process Patterns Enhancing Semiconductor Manufacturing by Pattern Recognition in Analog Wafermaps},
author = {Stefan Schrunner and Anna Jenul and Michael Scheiber and Anja Zernig and Andre Kästner and Roman Kern},
year = {2019},
doi = {10.1109/SMC.2019.8914309},
url = {https://doi.org/10.1109/SMC.2019.8914309},
researchr = {https://researchr.org/publication/SchrunnerJSZKK19},
cites = {0},
citedby = {0},
pages = {3555-3560},
booktitle = {2019 IEEE International Conference on Systems, Man and Cybernetics, SMC 2019, Bari, Italy, October 6-9, 2019},
publisher = {IEEE},
isbn = {978-1-7281-4569-3},
}