Estimator based multi-eigenmode control of cantilevers in multifrequency Atomic Force Microscopy - researchr publication authors

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Andreas Schuh, Iman Soltani Bozchalooi, Ivo Rangelow, Kamal Youcef-Toumi. Estimator based multi-eigenmode control of cantilevers in multifrequency Atomic Force Microscopy. In American Control Conference, ACC 2015, Chicago, IL, USA, July 1-3, 2015. pages 1905-1910, IEEE, 2015. [doi]

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