Mike Schwarz. The Need of Simulation Methodologies for Active Semiconductor Devices in MEMS : Invited Paper. In Andrzej Napieralksi, editor, 26th International Conference on Mixed Design of Integrated Circuits and Systems, MIXDES 2019, Rzeszów, Poland, June 27-29, 2019. pages 65-70, IEEE, 2019. [doi]
Abstract is missing.