New trends in the application of Scanning Probe Techniques in Failure Analysis

Thomas Schweinböck, S. Schömann, D. Álvarez, Marco Buzzo, Werner Frammelsberger, Peter Breitschopf, Günther Benstetter. New trends in the application of Scanning Probe Techniques in Failure Analysis. Microelectronics Reliability, 44(9-11):1541-1546, 2004. [doi]

Abstract

Abstract is missing.