Monolithic 3D-ICs with single crystal silicon layers

Deepak C. Sekar, Zvi Or-Bach. Monolithic 3D-ICs with single crystal silicon layers. In Mitsumasa Koyanagi, Morihiro Kada, editors, 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31 - February 2, 2012. pages 1-2, IEEE, 2011. [doi]

Abstract

Abstract is missing.