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Optimal mechanical parameter design using Self Resonance Cancellation control for gantry-type high precision stage

Yushi Seki, Hiroshi Fujimoto, Kazuaki Saiki. Optimal mechanical parameter design using Self Resonance Cancellation control for gantry-type high precision stage. In 12th IEEE International Workshop on Advanced Motion Control, AMC 2012, Sarajevo, Bosnia and Herzegovina, March 25-27, 2012. pages 1-6, IEEE, 2012. [doi]

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Yushi Seki

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Hiroshi Fujimoto

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Kazuaki Saiki

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