Improvement of vibration suppression performance of galvano mirror using piezoelectric element

Kenta Seki, Hiroki Yokoi, Makoto Iwasaki. Improvement of vibration suppression performance of galvano mirror using piezoelectric element. In 38th Annual Conference on IEEE Industrial Electronics Society, IECON 2012, Montreal, QC, Canada, October 25-28, 2012. pages 3814-3819, IEEE, 2012. [doi]

Abstract

Abstract is missing.