Hierarchical Aggregation/Disaggregation for Adaptive Abstraction-Level Conversion in Digital Twin-Based Smart Semiconductor Manufacturing

Moon Gi Seok, Wentong Cai 0001, Daejin Park. Hierarchical Aggregation/Disaggregation for Adaptive Abstraction-Level Conversion in Digital Twin-Based Smart Semiconductor Manufacturing. IEEE Access, 9:71145-71158, 2021. [doi]

Abstract

Abstract is missing.