Catalytic Hafnium Oxide Calorimetric MEMS Gas and Chemical Sensor

Mohamed Serry, Ioana Voiculcscu, Ahmed Kobtan. Catalytic Hafnium Oxide Calorimetric MEMS Gas and Chemical Sensor. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]

Abstract

Abstract is missing.