Andi Setiono, Maik Bertke, Wilson Ombati Nyang'au, Jiushuai Xu, Michael Fahrbach, Ina Kirsch, Erik Uhde, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Hutomo Suryo Wasisto, Erwin Peiner. In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection. Sensors, 20(3):618, 2020. [doi]
Abstract is missing.