From 2D-planar to 3D-non-planar device architecture: A scalable path forward?

Ghavam G. Shahidi. From 2D-planar to 3D-non-planar device architecture: A scalable path forward?. In Proceedings of the IEEE 2013 Custom Integrated Circuits Conference, San Jose, CA, USA, September 22-25, 2013. pages 1-8, IEEE, 2013. [doi]

@inproceedings{Shahidi13,
  title = {From 2D-planar to 3D-non-planar device architecture: A scalable path forward?},
  author = {Ghavam G. Shahidi},
  year = {2013},
  doi = {10.1109/CICC.2013.6658477},
  url = {http://dx.doi.org/10.1109/CICC.2013.6658477},
  researchr = {https://researchr.org/publication/Shahidi13},
  cites = {0},
  citedby = {0},
  pages = {1-8},
  booktitle = {Proceedings of the IEEE 2013 Custom Integrated Circuits Conference, San Jose, CA, USA, September 22-25, 2013},
  publisher = {IEEE},
}