From 2D-planar to 3D-non-planar device architecture: A scalable path forward?

Ghavam G. Shahidi. From 2D-planar to 3D-non-planar device architecture: A scalable path forward?. In Proceedings of the IEEE 2013 Custom Integrated Circuits Conference, San Jose, CA, USA, September 22-25, 2013. pages 1-8, IEEE, 2013. [doi]

Abstract

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