Mohammed M. Shalaby, Zhongde Wang, Linda L.-W. Chow, Brian D. Jensen, John L. Volakis, Katsuo Kurabayashi, Kazuhiro Saitou. Robust Design of RF-MEMS Cantilever Switches Using Contact Physics Modeling. IEEE Transactions on Industrial Electronics, 56(4):1012-1021, 2009. [doi]
Abstract is missing.