Ultra-high speed video capturing of time dependent dielectric breakdown of metal-oxide-silicon capacitor up to 10M frame per second

F. Shao, D. Kimoto, K. Furukawa, Hidetake Sugo, T. Takeda, Ken Miyauchi, Yasuhisa Tochigi, Rihito Kuroda, Shigetoshi Sugawa. Ultra-high speed video capturing of time dependent dielectric breakdown of metal-oxide-silicon capacitor up to 10M frame per second. In Ralf Widenhorn, Antoine Dupret, editors, Image Sensors and Imaging Systems 2014, San Francisco, California, USA, February 2-6, 2014. Volume 9022 of SPIE Proceedings, pages 902205, SPIE, 2014. [doi]

Abstract

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