Shuai Shao, Zhifang Luo, Tao Wu. Optimization of S1 Lamb wave resonators with A10.8Sc0.2N. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1523-1526, IEEE, 2021. [doi]
Abstract is missing.