Excursion Prevention Strategyto Increase Chip Performance by Photomask Tuning

Ofir Sharoni, Yael Sufrin, Avi Cohen, Rolf Seltmann, Aravind Narayana, Thomas Thamm. Excursion Prevention Strategyto Increase Chip Performance by Photomask Tuning. In 2020 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2020, Hsinchu, Taiwan, August 10-13, 2020. pages 1, IEEE, 2020. [doi]

Abstract

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