Development of three-dimensional chip stacking technology using a clamped through-silicon via interconnection

Li-Cheng Shen, Chien-Wei Chien, Hsien-Chie Cheng, Chia-Te Lin. Development of three-dimensional chip stacking technology using a clamped through-silicon via interconnection. Microelectronics Reliability, 50(4):489-497, 2010. [doi]

Abstract

Abstract is missing.