Dynamic force measurement for microassembly of surface MEMS structures

Yantao Shen, Ning Xi, Wen J. Li. Dynamic force measurement for microassembly of surface MEMS structures. In IEEE International Conference on Robotics and Biomimetics, ROBIO 2005, Shatin, N.T. China, 5-9 July 2005. pages 646-651, IEEE, 2005. [doi]

Abstract

Abstract is missing.