High sensitivity 2-D force sensor for assembly of surface MEMS devices - researchr publication authors

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Yantao Shen, Ning Xi, Uchechukwu C. Wejinya, Wen J. Li. High sensitivity 2-D force sensor for assembly of surface MEMS devices. In 2004 IEEE/RSJ International Conference on Intelligent Robots and Systems, Sendai, Japan, September 28 - October 2, 2004. pages 3363-3368, IEEE, 2004. [doi]

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