A Fully Integrated Miniatured Capacitive Angle Encoder based on MEMS Fabrication and ASIC Implementation

Jiahui Shi, Hua Liao, Bowen Xing, Bin Zhou, Qi Wei 0001, Rong Zhang 0005. A Fully Integrated Miniatured Capacitive Angle Encoder based on MEMS Fabrication and ASIC Implementation. In 2022 IEEE Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022. pages 1-4, IEEE, 2022. [doi]

Abstract

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