An On-Chip Inductive-Capacitive Sensor for the Detection of Wear Debris and Air Bubbles in Hydraulic Oil

Haotian Shi, Hongpeng Zhang, Wei Li, Zhiwei Xu, Laihao Ma, Yucai Xie, Dian Huo. An On-Chip Inductive-Capacitive Sensor for the Detection of Wear Debris and Air Bubbles in Hydraulic Oil. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1250-1253, IEEE, 2021. [doi]

Abstract

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