Hisae Shibuya, Yuji Takagi. Practical Pattern Detection from Distributed Defect Points on a Semiconductor Wafer. In Proceedings of the IAPR Conference on Machine Vision Applications (IAPR MVA 2002), December 11-13, 2002, Nara-ken New Public Hall, Nara, Japan. pages 10-13, 2002. [doi]
Abstract is missing.