Seongbo Shim, Youngsoo Shin. Fast Verification of Guide-Patterns for Directed Self-Assembly Lithography. IEEE Trans. on CAD of Integrated Circuits and Systems, 36(9):1522-1531, 2017. [doi]
@article{ShimS17,
title = {Fast Verification of Guide-Patterns for Directed Self-Assembly Lithography},
author = {Seongbo Shim and Youngsoo Shin},
year = {2017},
doi = {10.1109/TCAD.2016.2629419},
url = {https://doi.org/10.1109/TCAD.2016.2629419},
researchr = {https://researchr.org/publication/ShimS17},
cites = {0},
citedby = {0},
journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
volume = {36},
number = {9},
pages = {1522-1531},
}